# | Class | status | |
---|---|---|---|
1 |
S:78860347
M:WE KNOW HOW TO WRITE NANOMETER O:Xlith GmbH |
9, 40, 42 | Registered |
2 |
S:76310236
M:XLITH O:Maile, Bernd E., XLITH GMBH |
9, 40, 42 | Registered |
3 |
S:76310238
M:EXTREME LITHOGRAPHY O:Maile, Bernd E., XLITH GMBH |
9, 40, 42 | Registered |